Microstructure and piezoelectric response of AlN/SiC heterostructures grown on silicon substrates of different orientation

Please use this identifier to cite or link to this item: http://elar.urfu.ru/handle/10995/80718

Title:	Microstructure and piezoelectric response of AlN/SiC heterostructures grown on silicon substrates of different orientation
Authors:	Senkevich, S. V. Sharofidinov, S. S. Kiselev, D. A. Pronin, I. P. Kukushkin, S. A.
Issue Date:	2018
Publisher:	Ural Federal University
Citation:	Microstructure and piezoelectric response of AlN/SiC heterostructures grown on silicon substrates of different orientation / S. V. Senkevich, S. S. Sharofidinov, D. A. Kiselev, I. P. Pronin, S. A. Kukushkin // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 194.
URI:	http://elar.urfu.ru/handle/10995/80718
Conference name:	International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials"
Conference date:	26.08.2018-29.08.2018
ISBN:	978-5-9500624-1-4
Sponsorship:	The work was partly supported by the Ministry for Education and Science (Russian Federation) (Grant No 16.2811.2017/4.6).
Origin:	International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018
Appears in Collections:	Scanning Probe Microscopy

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