Study of the surface profiling of silicon based on the method of local anodic oxidation using scanning probe microscopy

Please use this identifier to cite or link to this item: http://elar.urfu.ru/handle/10995/80711

Title:	Study of the surface profiling of silicon based on the method of local anodic oxidation using scanning probe microscopy
Authors:	Polyakova, V. V. Kots, I. N. Smirnov, V. A. Ageev, O. A.
Issue Date:	2018
Publisher:	Ural Federal University
Citation:	Study of the surface profiling of silicon based on the method of local anodic oxidation using scanning probe microscopy / V. V. Polyakova, I. N. Kots, V. A. Smirnov, O. A. Ageev // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 183-184.
URI:	http://elar.urfu.ru/handle/10995/80711
Conference name:	International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials"
Conference date:	26.08.2018-29.08.2018
ISBN:	978-5-9500624-1-4
Origin:	International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018
Appears in Collections:	Scanning Probe Microscopy

Files in This Item:

File	Description	Size	Format
978-5-9500624-1-4_2018_132.pdf		380,45 kB	Adobe PDF	View/Open