Please use this identifier to cite or link to this item: http://hdl.handle.net/10995/80711
Title: Study of the surface profiling of silicon based on the method of local anodic oxidation using scanning probe microscopy
Authors: Polyakova, V. V.
Kots, I. N.
Smirnov, V. A.
Ageev, O. A.
Issue Date: 2018
Publisher: Ural Federal University
Citation: Study of the surface profiling of silicon based on the method of local anodic oxidation using scanning probe microscopy / V. V. Polyakova, I. N. Kots, V. A. Smirnov, O. A. Ageev // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 183-184.
URI: http://hdl.handle.net/10995/80711
Conference name: International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials"
Conference date: 26.08.2018-29.08.2018
ISBN: 978-5-9500624-1-4
Origin: International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018
Appears in Collections:Scanning Probe Microscopy

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