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|Title:||Local anodic oxidation by the probe method as a surface modification method for nanoscale profiling|
|Authors:||Rezvan, A. A.|
Klimin, V. S.
|Publisher:||Ural Federal University|
|Citation:||Rezvan A. A. Local anodic oxidation by the probe method as a surface modification method for nanoscale profiling / A. A. Rezvan, V. S. Klimin // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 188-189.|
|Conference name:||International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials"|
|metadata.dc.description.sponsorship:||During the implementation of experimental studies, a technique for nanosized profiling of GaAs structures by a combination of local anodic oxidation and plasma chemical etching was developed and implemented. This work was carried out with support of the Southern Federal University (grant VnGr-07/2017-02). The results were obtained using the equipment of the Research and Education Center and Center for Collective Use "Nanotechnologies" of Southern Federal University.|
|Origin:||International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018|
|Appears in Collections:||Scanning Probe Microscopy|
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