Local anodic oxidation by the probe method as a surface modification method for nanoscale profiling

Rezvan, A. A.; Klimin, V. S.

Please use this identifier to cite or link to this item: http://elar.urfu.ru/handle/10995/80715

Title:	Local anodic oxidation by the probe method as a surface modification method for nanoscale profiling
Authors:	Rezvan, A. A. Klimin, V. S.
Issue Date:	2018
Publisher:	Ural Federal University
Citation:	Rezvan A. A. Local anodic oxidation by the probe method as a surface modification method for nanoscale profiling / A. A. Rezvan, V. S. Klimin // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 188-189.
URI:	http://elar.urfu.ru/handle/10995/80715
Conference name:	International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials"
Conference date:	26.08.2018-29.08.2018
ISBN:	978-5-9500624-1-4
Sponsorship:	During the implementation of experimental studies, a technique for nanosized profiling of GaAs structures by a combination of local anodic oxidation and plasma chemical etching was developed and implemented. This work was carried out with support of the Southern Federal University (grant VnGr-07/2017-02). The results were obtained using the equipment of the Research and Education Center and Center for Collective Use "Nanotechnologies" of Southern Federal University.
Origin:	International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018
Appears in Collections:	Scanning Probe Microscopy

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