ISSN: 2310-757X
Пожалуйста, используйте этот идентификатор, чтобы цитировать или ссылаться на этот ресурс:
http://elar.urfu.ru/handle/10995/80715Полная запись метаданных
| Поле DC | Значение | Язык |
|---|---|---|
| dc.contributor.author | Rezvan, A. A. | en |
| dc.contributor.author | Klimin, V. S. | en |
| dc.date.accessioned | 2020-03-24T06:59:25Z | - |
| dc.date.available | 2020-03-24T06:59:25Z | - |
| dc.date.issued | 2018 | - |
| dc.identifier.citation | Rezvan A. A. Local anodic oxidation by the probe method as a surface modification method for nanoscale profiling / A. A. Rezvan, V. S. Klimin // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 188-189. | en |
| dc.identifier.isbn | 978-5-9500624-1-4 | - |
| dc.identifier.uri | http://elar.urfu.ru/handle/10995/80715 | - |
| dc.description.sponsorship | During the implementation of experimental studies, a technique for nanosized profiling of GaAs structures by a combination of local anodic oxidation and plasma chemical etching was developed and implemented. This work was carried out with support of the Southern Federal University (grant VnGr-07/2017-02). The results were obtained using the equipment of the Research and Education Center and Center for Collective Use "Nanotechnologies" of Southern Federal University. | en |
| dc.format.mimetype | application/pdf | en |
| dc.language.iso | en | en |
| dc.publisher | Ural Federal University | en |
| dc.relation.ispartof | International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018 | en |
| dc.title | Local anodic oxidation by the probe method as a surface modification method for nanoscale profiling | en |
| dc.type | Conference Paper | en |
| dc.type | info:eu-repo/semantics/conferenceObject | en |
| dc.type | info:eu-repo/semantics/publishedVersion | en |
| dc.conference.name | International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials" | en |
| dc.conference.date | 26.08.2018-29.08.2018 | - |
| local.description.firstpage | 188 | - |
| local.description.lastpage | 189 | - |
| local.description.order | P-77 | - |
| Располагается в коллекциях: | Scanning Probe Microscopy | |
Файлы этого ресурса:
| Файл | Описание | Размер | Формат | |
|---|---|---|---|---|
| 978-5-9500624-1-4_2018_136.pdf | 349,63 kB | Adobe PDF | Просмотреть/Открыть |
Все ресурсы в архиве электронных ресурсов защищены авторским правом, все права сохранены.