Please use this identifier to cite or link to this item: http://hdl.handle.net/10995/80715
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dc.contributor.authorRezvan, A. A.en
dc.contributor.authorKlimin, V. S.en
dc.date.accessioned2020-03-24T06:59:25Z-
dc.date.available2020-03-24T06:59:25Z-
dc.date.issued2018-
dc.identifier.citationRezvan A. A. Local anodic oxidation by the probe method as a surface modification method for nanoscale profiling / A. A. Rezvan, V. S. Klimin // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 188-189.en
dc.identifier.isbn978-5-9500624-1-4-
dc.identifier.urihttp://hdl.handle.net/10995/80715-
dc.description.sponsorshipDuring the implementation of experimental studies, a technique for nanosized profiling of GaAs structures by a combination of local anodic oxidation and plasma chemical etching was developed and implemented. This work was carried out with support of the Southern Federal University (grant VnGr-07/2017-02). The results were obtained using the equipment of the Research and Education Center and Center for Collective Use "Nanotechnologies" of Southern Federal University.en
dc.format.mimetypeapplication/pdfen
dc.language.isoenen
dc.publisherUral Federal Universityen
dc.relation.ispartofInternational Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018en
dc.titleLocal anodic oxidation by the probe method as a surface modification method for nanoscale profilingen
dc.typeConference Paperen
dc.typeinfo:eu-repo/semantics/conferenceObjecten
dc.typeinfo:eu-repo/semantics/publishedVersionen
dc.conference.nameInternational Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials"en
dc.conference.date26.08.2018-29.08.2018-
local.description.firstpage188-
local.description.lastpage189-
local.description.orderP-77-
Appears in Collections:Scanning Probe Microscopy

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