Please use this identifier to cite or link to this item: http://hdl.handle.net/10995/80715
Title: Local anodic oxidation by the probe method as a surface modification method for nanoscale profiling
Authors: Rezvan, A. A.
Klimin, V. S.
Issue Date: 2018
Publisher: Ural Federal University
Citation: Rezvan A. A. Local anodic oxidation by the probe method as a surface modification method for nanoscale profiling / A. A. Rezvan, V. S. Klimin // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 188-189.
URI: http://hdl.handle.net/10995/80715
Conference name: International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials"
Conference date: 26.08.2018-29.08.2018
ISBN: 978-5-9500624-1-4
metadata.dc.description.sponsorship: During the implementation of experimental studies, a technique for nanosized profiling of GaAs structures by a combination of local anodic oxidation and plasma chemical etching was developed and implemented. This work was carried out with support of the Southern Federal University (grant VnGr-07/2017-02). The results were obtained using the equipment of the Research and Education Center and Center for Collective Use "Nanotechnologies" of Southern Federal University.
Origin: International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018
Appears in Collections:Scanning Probe Microscopy

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