ISSN: 2310-757X
Please use this identifier to cite or link to this item:
http://elar.urfu.ru/handle/10995/80684| Title: | Morphology of multilayer AlN/SiN coatings |
| Authors: | Kuznetsova, T. A. Lapitskaja, V. A. Chizhik, S. A. Uglov, V. V. Shymanski, V. I. Kvasov, N. T. |
| Issue Date: | 2018 |
| Publisher: | Ural Federal University |
| Citation: | Morphology of multilayer AlN/SiN coatings / T. A. Kuznetsova, V. A. Lapitskaja, S. A. Chizhik, V. V. Uglov, V. I. Shymanski, N. T. Kvasov // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 153. |
| URI: | http://elar.urfu.ru/handle/10995/80684 |
| Conference name: | International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials" |
| Conference date: | 26.08.2018-29.08.2018 |
| ISBN: | 978-5-9500624-1-4 |
| Origin: | International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018 |
| Appears in Collections: | Scanning Probe Microscopy |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 978-5-9500624-1-4_2018_108.pdf | 232,08 kB | Adobe PDF | View/Open |
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