Please use this identifier to cite or link to this item: http://hdl.handle.net/10995/80684
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dc.contributor.authorKuznetsova, T. A.en
dc.contributor.authorLapitskaja, V. A.en
dc.contributor.authorChizhik, S. A.en
dc.contributor.authorUglov, V. V.en
dc.contributor.authorShymanski, V. I.en
dc.contributor.authorKvasov, N. T.en
dc.date.accessioned2020-03-24T06:59:18Z-
dc.date.available2020-03-24T06:59:18Z-
dc.date.issued2018-
dc.identifier.citationMorphology of multilayer AlN/SiN coatings / T. A. Kuznetsova, V. A. Lapitskaja, S. A. Chizhik, V. V. Uglov, V. I. Shymanski, N. T. Kvasov // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 153.en
dc.identifier.isbn978-5-9500624-1-4-
dc.identifier.urihttp://hdl.handle.net/10995/80684-
dc.format.mimetypeapplication/pdfen
dc.language.isoenen
dc.publisherUral Federal Universityen
dc.relation.ispartofInternational Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018en
dc.titleMorphology of multilayer AlN/SiN coatingsen
dc.typeConference Paperen
dc.typeinfo:eu-repo/semantics/conferenceObjecten
dc.typeinfo:eu-repo/semantics/publishedVersionen
dc.conference.nameInternational Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials"en
dc.conference.date26.08.2018-29.08.2018-
local.description.firstpage153-
local.description.lastpage153-
local.description.orderP-49-
Appears in Collections:Scanning Probe Microscopy

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