Please use this identifier to cite or link to this item: http://hdl.handle.net/10995/80684
Title: Morphology of multilayer AlN/SiN coatings
Authors: Kuznetsova, T. A.
Lapitskaja, V. A.
Chizhik, S. A.
Uglov, V. V.
Shymanski, V. I.
Kvasov, N. T.
Issue Date: 2018
Publisher: Ural Federal University
Citation: Morphology of multilayer AlN/SiN coatings / T. A. Kuznetsova, V. A. Lapitskaja, S. A. Chizhik, V. V. Uglov, V. I. Shymanski, N. T. Kvasov // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 153.
URI: http://hdl.handle.net/10995/80684
Conference name: International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials"
Conference date: 26.08.2018-29.08.2018
ISBN: 978-5-9500624-1-4
Origin: International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018
Appears in Collections:Scanning Probe Microscopy

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