Please use this identifier to cite or link to this item: http://hdl.handle.net/10995/26798
Title: Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography
ИССЛЕДОВАНИЕ ВОЗМОЖНОСТИ УМЕНЬШЕНИЯ УГЛОВЫХ ПОГРЕШНОСТЕЙ КРУГОВЫХ ОПТИЧЕСКИХ ШКАЛ, ИЗГОТОВЛЕННЫХ СПОСОБОМ ОБРАТНОЙ ФОТОЛИТОГРАФИИ
Authors: Kruchinin, D. Yu.
Issue Date: 2013
Citation: Kruchinin D. Yu. Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography / D. Yu. Kruchinin // Journal of Optical Technology. — 2013. — Vol. 80. — № 8. — P. 499-501.
Abstract: This paper discusses the possibilities of reducing the angular errors of circular optical scales fabricated by lift-off photolithography, using photomasks synthesized by means of a CLWS-300 laser image generator. © 2013 Optical Society of America.
Keywords: ANGULAR ERRORS
LASER IMAGES
ERRORS
PHOTOLITHOGRAPHY
URI: http://hdl.handle.net/10995/26798
RSCI ID: 23334547
SCOPUS ID: 84886012916
WOS ID: 000327246100007
PURE ID: 893007
ISSN: 1070-9762
DOI: 10.1364/JOT.80.000499
Appears in Collections:Научные публикации, проиндексированные в SCOPUS и WoS CC

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