Please use this identifier to cite or link to this item: http://hdl.handle.net/10995/112055
Title: Obtaining of TiSiCN Coatings by Anodic Evaporation of Titanium and Decomposition of Hexamethyldisilazane in a Low-Pressure Arc Discharge
Authors: Menshakov, A. I.
Bruhanova, Y. A.
Skorynina, P. A.
Issue Date: 2021
Publisher: IOP Publishing Ltd
IOP Publishing
Citation: Menshakov A. I. Obtaining of TiSiCN Coatings by Anodic Evaporation of Titanium and Decomposition of Hexamethyldisilazane in a Low-Pressure Arc Discharge / A. I. Menshakov, Y. A. Bruhanova, P. A. Skorynina // Journal of Physics: Conference Series. — 2021. — Vol. 1954. — Iss. 1. — 12032.
Abstract: The method of TiSiCN-coatings deposition by anodic evaporation of Ti and decomposition of an organosilicon precursor (hexamethyldisilazane) in a low-pressure (∼1 mTorr) nitrogen-argon arc discharge with a self-heated hollow cathode is investigated. The plasma composition was analyzed by optical emission spectroscopy. TiSiCN coatings with a thickness of up to 10 microns and a hardness of up to 30 GPa were obtained in 1.5 hours at a temperature of 400 C. © Published under licence by IOP Publishing Ltd.
Keywords: COATINGS
EVAPORATION
OPTICAL EMISSION SPECTROSCOPY
SILICON
SILICON COMPOUNDS
TITANIUM COMPOUNDS
ARGON ARC DISCHARGE
COATINGS DEPOSITION
HEXAMETHYLDISILAZANE
HOLLOW CATHODES
LOW PRESSURE ARC
LOW PRESSURES
ORGANO-SILICON PRECURSOR
PLASMA COMPOSITION
NITROGEN COMPOUNDS
URI: http://hdl.handle.net/10995/112055
Access: info:eu-repo/semantics/openAccess
Conference name: 15th International Conference on Films and Coatings, ICFC 2021
Conference date: 18 May 2021 through 20 May 2021
SCOPUS ID: 85109287991
PURE ID: 22822864
ISSN: 1742-6588
metadata.dc.description.sponsorship: The work was supported by the Russian Science Foundation (grant no. 20-79-10059).
RSCF project card: 20-79-10059
Appears in Collections:Научные публикации, проиндексированные в SCOPUS и WoS CC

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