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|Title:||Obtaining of TiSiCN Coatings by Anodic Evaporation of Titanium and Decomposition of Hexamethyldisilazane in a Low-Pressure Arc Discharge|
|Authors:||Menshakov, A. I.|
Bruhanova, Y. A.
Skorynina, P. A.
|Publisher:||IOP Publishing Ltd|
|Citation:||Menshakov A. I. Obtaining of TiSiCN Coatings by Anodic Evaporation of Titanium and Decomposition of Hexamethyldisilazane in a Low-Pressure Arc Discharge / A. I. Menshakov, Y. A. Bruhanova, P. A. Skorynina // Journal of Physics: Conference Series. — 2021. — Vol. 1954. — Iss. 1. — 12032.|
|Abstract:||The method of TiSiCN-coatings deposition by anodic evaporation of Ti and decomposition of an organosilicon precursor (hexamethyldisilazane) in a low-pressure (∼1 mTorr) nitrogen-argon arc discharge with a self-heated hollow cathode is investigated. The plasma composition was analyzed by optical emission spectroscopy. TiSiCN coatings with a thickness of up to 10 microns and a hardness of up to 30 GPa were obtained in 1.5 hours at a temperature of 400 C. © Published under licence by IOP Publishing Ltd.|
OPTICAL EMISSION SPECTROSCOPY
ARGON ARC DISCHARGE
LOW PRESSURE ARC
|Conference name:||15th International Conference on Films and Coatings, ICFC 2021|
|Conference date:||18 May 2021 through 20 May 2021|
|metadata.dc.description.sponsorship:||The work was supported by the Russian Science Foundation (grant no. 20-79-10059).|
|RSCF project card:||20-79-10059|
|Appears in Collections:||Научные публикации, проиндексированные в SCOPUS и WoS CC|
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