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Title: A novel method of silicon synthesis by CVD
Authors: Shishkin, R. A.
Kudyakova, V. S.
Yuferov, Yu. V.
Zykov, F. M.
Issue Date: 2019
Publisher: American Institute of Physics Inc.
Citation: A novel method of silicon synthesis by CVD / R. A. Shishkin, V. S. Kudyakova, Yu. V. Yuferov, et al. — DOI 10.1063/1.5134214 // AIP Conference Proceedings. — 2019. — Vol. 2174. — 020063.
Abstract: Silicon fibers were synthesized by a novel CVD method including in the interaction of aluminum monofluoride with silicon oxide, the final product containing nanofibers in an amount of 15 wt. %. The possibility of selective reduction of silicon oxide from the chamotte refractory plate was also demonstrated. Si was characterized by SEM and XRD. Thermodynamics and mechanism of silicon fiber formation were also considered. © 2019 Author(s).
Access: info:eu-repo/semantics/openAccess
SCOPUS ID: 85076600029
PURE ID: 11747635
ISSN: 0094243X
ISBN: 9780735419216
DOI: 10.1063/1.5134214
Appears in Collections:Научные публикации, проиндексированные в SCOPUS и WoS CC

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