A novel method of silicon synthesis by CVD

Abstract

Silicon fibers were synthesized by a novel CVD method including in the interaction of aluminum monofluoride with silicon oxide, the final product containing nanofibers in an amount of 15 wt. %. The possibility of selective reduction of silicon oxide from the chamotte refractory plate was also demonstrated. Si was characterized by SEM and XRD. Thermodynamics and mechanism of silicon fiber formation were also considered. © 2019 Author(s).