A novel method of silicon synthesis by CVD

Shishkin, R. A.; Kudyakova, V. S.; Yuferov, Yu. V.; Zykov, F. M.

doi:10.1063/1.5134214

Please use this identifier to cite or link to this item: http://elar.urfu.ru/handle/10995/101633

Full metadata record

DC Field	Value	Language
dc.contributor.author	Shishkin, R. A.	en
dc.contributor.author	Kudyakova, V. S.	en
dc.contributor.author	Yuferov, Yu. V.	en
dc.contributor.author	Zykov, F. M.	en
dc.date.accessioned	2021-08-31T14:58:34Z	-
dc.date.available	2021-08-31T14:58:34Z	-
dc.date.issued	2019	-
dc.identifier.citation	A novel method of silicon synthesis by CVD / R. A. Shishkin, V. S. Kudyakova, Yu. V. Yuferov, et al. — DOI 10.1063/1.5134214 // AIP Conference Proceedings. — 2019. — Vol. 2174. — 020063.	en
dc.identifier.isbn	9780735419216	-
dc.identifier.issn	0094243X	-
dc.identifier.other	Final	2
dc.identifier.other	All Open Access, Green	3
dc.identifier.other	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85076600029&doi=10.1063%2f1.5134214&partnerID=40&md5=bad5d8a74a61636dadc37cdac09c6264
dc.identifier.other	https://elar.urfu.ru/bitstream/10995/98499/1/978-5-8295-0640-7_2019_337.pdf	m
dc.identifier.uri	http://elar.urfu.ru/handle/10995/101633	-
dc.description.abstract	Silicon fibers were synthesized by a novel CVD method including in the interaction of aluminum monofluoride with silicon oxide, the final product containing nanofibers in an amount of 15 wt. %. The possibility of selective reduction of silicon oxide from the chamotte refractory plate was also demonstrated. Si was characterized by SEM and XRD. Thermodynamics and mechanism of silicon fiber formation were also considered. © 2019 Author(s).	en
dc.format.mimetype	application/pdf	en
dc.language.iso	en	en
dc.publisher	American Institute of Physics Inc.	en
dc.rights	info:eu-repo/semantics/openAccess	en
dc.source	AIP Conf. Proc.	2
dc.source	AIP Conference Proceedings	en
dc.title	A novel method of silicon synthesis by CVD	en
dc.type	Conference Paper	en
dc.type	info:eu-repo/semantics/conferenceObject	en
dc.type	info:eu-repo/semantics/publishedVersion	en
dc.identifier.doi	10.1063/1.5134214	-
dc.identifier.scopus	85076600029	-
local.contributor.employee	Shishkin, R.A., Ural Federal University Named after the First President of Russia B. N. Yeltsin, Yekaterinburg, Russian Federation, Institute of Solid State Chemistry, Ural Branch, Russian Academy of Sciences, Yekaterinburg, Russian Federation
local.contributor.employee	Kudyakova, V.S., Ural Federal University Named after the First President of Russia B. N. Yeltsin, Yekaterinburg, Russian Federation, Institute of Solid State Chemistry, Ural Branch, Russian Academy of Sciences, Yekaterinburg, Russian Federation
local.contributor.employee	Yuferov, Yu.V., Ural Federal University Named after the First President of Russia B. N. Yeltsin, Yekaterinburg, Russian Federation, Institute of Solid State Chemistry, Ural Branch, Russian Academy of Sciences, Yekaterinburg, Russian Federation
local.contributor.employee	Zykov, F.M., Ural Federal University Named after the First President of Russia B. N. Yeltsin, Yekaterinburg, Russian Federation, Institute of Solid State Chemistry, Ural Branch, Russian Academy of Sciences, Yekaterinburg, Russian Federation
local.volume	2174	-
local.contributor.department	Ural Federal University Named after the First President of Russia B. N. Yeltsin, Yekaterinburg, Russian Federation
local.contributor.department	Institute of Solid State Chemistry, Ural Branch, Russian Academy of Sciences, Yekaterinburg, Russian Federation
local.identifier.pure	11747635	-
local.identifier.pure	418b2267-3cfe-4569-b067-4a072d781842	uuid
local.description.order	020063	-
local.identifier.eid	2-s2.0-85076600029	-
Appears in Collections:	Научные публикации ученых УрФУ, проиндексированные в SCOPUS и WoS CC

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