Теория ионного распыления металла в виде стабильных нейтральных и заряженных кластеров для разработок эффективных источников кластеров и кластерных ионов

Abstract

We have developed a theory of sputtering metal in the form of excited neutral and charged clusters and their subsequent fragmentation to a stable state. Our theory is based on simple physical assumptions and is in good agreement with experiment. The result are presented in the form suitable for the use of formulas. As an example of the calculation of the total yields of stable neutral and charged clusters of silver.