Модуль для высокотемпературного отжига широкозонных материалов в различных газовых средах

Abstract

The module is developed for high-temperature annealing of samples in air, in vacuum and in various gaseous environments. The module includes two independent heaters with a maximum temperature of up to 950 º С and up to 1300 º С with the possibility of programmed heating control. For vacuuming and gas supply, the corresponding systems of the module for plasma-chemical deposition and etching of the Nanofab 100 platform are used.