Fabrication process for producing silicon nanowire field effect transistors

Lukyanenko, A. V.; Tarasov, A. S.; Yakovlev, I. A.; Zelenov, F. V.; Smolyarova, T. E.; Bondarev, I. A.; Ovchinnikov, S. G.; Volkov, N. V.

Please use this identifier to cite or link to this item: http://elar.urfu.ru/handle/10995/80690

Title:	Fabrication process for producing silicon nanowire field effect transistors
Authors:	Lukyanenko, A. V. Tarasov, A. S. Yakovlev, I. A. Zelenov, F. V. Smolyarova, T. E. Bondarev, I. A. Ovchinnikov, S. G. Volkov, N. V.
Issue Date:	2018
Publisher:	Ural Federal University
Citation:	Fabrication process for producing silicon nanowire field effect transistors / A. V. Lukyanenko, A. S. Tarasov, I. A. Yakovlev, F. V. Zelenov, T. E. Smolyarova, I. A. Bondarev, S. G. Ovchinnikov, N. V. Volkov // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 160.
URI:	http://elar.urfu.ru/handle/10995/80690
Conference name:	International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials"
Conference date:	26.08.2018-29.08.2018
ISBN:	978-5-9500624-1-4
metadata.dc.description.sponsorship:	The work was supported by the Russian Foundation for Basic Research, Government of Krasnoyarsk Territory, Krasnoyarsk Region Science and Technology Support Fund project no. 18-42-243022. This work is partially supported by the Ministry of Education and Science of the Russian Federation and by Siberian Branch of the Russian Academy of Sciences (Project II.8.70) and Fundamental research program of the Presidium of the RAS no. 32 «Nanostructures: physics, chemistry, biology, basics of technologies». This work was supported by and carried out on the equipment of the Center for Common Use of the Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences.
Origin:	International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018
Appears in Collections:	Scanning Probe Microscopy

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