ISSN: 2310-757X
Please use this identifier to cite or link to this item:
http://elar.urfu.ru/handle/10995/72912| Title: | BN coatings deposition by magnetron sputtering of B and BN targets in electron beam generated plasma |
| Authors: | Kamenetskikh, A. S. Gavrilov, N. V. Koryakova, O. V. Cholakh, S. O. |
| Issue Date: | 2017 |
| Publisher: | IOP Publishing |
| Citation: | BN coatings deposition by magnetron sputtering of B and BN targets in electron beam generated plasma / A. S. Kamenetskikh, N. V. Gavrilov, O. V. Koryakova [et al.] // Journal Of Physics Conference Series. — 2017. — Vol. 857. — UNSP 012017. — DOI: 10.1088/1742-6596/857/1/012017. |
| URI: | http://elar.urfu.ru/handle/10995/72912 |
| Access: | cc-by |
| SCOPUS ID: | 85021327746 |
| WOS ID: | 000412709600017 |
| PURE ID: | 1932102 |
| ISSN: | 1742-6596 1742-6588 |
| DOI: | 10.1088/1742-6596/857/1/012017 |
| Appears in Collections: | Научные публикации ученых УрФУ, проиндексированные в SCOPUS и WoS CC |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 10.1088-1742-6596-857-1-012017.pdf | 644,81 kB | Adobe PDF | View/Open |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.