Please use this identifier to cite or link to this item: http://elar.urfu.ru/handle/10995/130606
Title: Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties
Authors: Kovalev, M.
Nastulyavichus, A.
Podlesnykh, I.
Stsepuro, N.
Pryakhina, V.
Greshnyakov, E.
Serdobintsev, A.
Gritsenko, I.
Khmelnitskii, R.
Kudryashov, S.
Issue Date: 2023
Publisher: MDPI
Citation: Kovalev, M, Nastulyavichus, A, Podlesnykh, I, Stsepuro, N, Pryakhina, V, Greshnyakov, E, Serdobintsev, A, Gritsenko, I, Khmelnitskii, R & Kudryashov, S 2023, 'Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties', Materials, Том. 16, № 12, 4439. https://doi.org/10.3390/ma16124439
Kovalev, M., Nastulyavichus, A., Podlesnykh, I., Stsepuro, N., Pryakhina, V., Greshnyakov, E., Serdobintsev, A., Gritsenko, I., Khmelnitskii, R., & Kudryashov, S. (2023). Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties. Materials, 16(12), [4439]. https://doi.org/10.3390/ma16124439
Abstract: The absorption of light in the near-infrared region of the electromagnetic spectrum by Au-hyperdoped Si has been observed. While silicon photodetectors in this range are currently being produced, their efficiency is low. Here, using the nanosecond and picosecond laser hyperdoping of thin amorphous Si films, their compositional (energy-dispersion X-ray spectroscopy), chemical (X-ray photoelectron spectroscopy), structural (Raman spectroscopy) and IR spectroscopic characterization, we comparatively demonstrated a few promising regimes of laser-based silicon hyperdoping with gold. Our results indicate that the optimal efficiency of impurity-hyperdoped Si materials has yet to be achieved, and we discuss these opportunities in light of our results. © 2023 by the authors.
Keywords: AMORPHOUS SI FILM
ENERGY-DISPERSIVE X-RAY MICROSPECTROSCOPY
GOLD IMPURITY
IR SPECTROSCOPY
LASER HYPERDOPING
RAMAN MICROSPECTROSCOPY
X-RAY PHOTOELECTRON MICROSPECTROSCOPY
ABSORPTION SPECTROSCOPY
GOLD
INFRARED DEVICES
PHOTODETECTORS
PHOTONS
SILICON
X RAY PHOTOELECTRON SPECTROSCOPY
AMORPHOUS SI FILMS
ENERGY-DISPERSIVE X-RAY MICROSPECTROSCOPY
ENERGY-DISPERSIVE X-RAYS
GOLD IMPURITIES
IR-SPECTROSCOPY
LASER HYPERDOPING
MICRO SPECTROSCOPY
RAMAN MICROSPECTROSCOPY
X-RAY MICROSPECTROSCOPY
X-RAY PHOTOELECTRON MICROSPECTROSCOPY
X-RAY PHOTOELECTRONS
INFRARED SPECTROSCOPY
URI: http://elar.urfu.ru/handle/10995/130606
Access: info:eu-repo/semantics/openAccess
cc-by
License text: https://creativecommons.org/licenses/by/4.0/
SCOPUS ID: 85163879301
WOS ID: 001017415400001
PURE ID: 41557486
ISSN: 1996-1944
DOI: 10.3390/ma16124439
metadata.dc.description.sponsorship: Ministry of Education and Science of the Russian Federation, Minobrnauka; Russian Science Foundation, RSF: 21-72-00116; Ministry of Science and Higher Education of the Russian Federation: 075-15-2021-677
We thank George Krasin from Lebedev Physical Institute for indispensable assistance in the graphical presentation of our scientific results. The equipment of the Ural Center for Shared Use “Modern nanotechnology” of Ural Federal University (Reg.#2968), which is supported by the Ministry of Science and Higher Education RF (Project #075-15-2021-677), was used. V.P.’s work was supported by Russian Science Foundation (project 21-72-00116).
This research was funded by the Ministry of Science and Higher Education of the Russian Federation (Ural Federal University Program of Development within the Priority-2030 Program).
RSCF project card: 21-72-00116
Appears in Collections:Научные публикации ученых УрФУ, проиндексированные в SCOPUS и WoS CC

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