Please use this identifier to cite or link to this item: http://hdl.handle.net/10995/112087
Title: Scanning Force Microscopy for the Study of Domain Structure in Ferroelectric Thin Films
Authors: Gruverman, A.
Auciello, O.
Tokumoto, H.
Issue Date: 1996
Publisher: American Institute of Physics Inc.
American Vacuum Society
Citation: Gruverman A. Scanning Force Microscopy for the Study of Domain Structure in Ferroelectric Thin Films / A. Gruverman, O. Auciello, H. Tokumoto // Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. — 1996. — Vol. 14. — Iss. 2. — P. 602-605.
Abstract: A piezoresponse technique based on scanning force microscopy (SFM) has been used for studying domain structure in ferroelectric thin films. Studies were performed on Pb(Zrx,Ti1-x)O3(PZT) thin films produced by a sol-gel method. The piezoresponse images of the PZT films were taken before and after inducing polarization in the films by applying a direct current voltage between the bottom electrode and the SFM tip. Polarization induced patterns were written with 20 V pulses and subsequently imaged by the SFM piezoresponse technique. The effect of the film structure on the imaging resolution of domains is discussed. © 1996 American Vacuum Society.
Keywords: CAPACITORS
CRYSTAL STRUCTURE
ELECTRODES
IMAGING TECHNIQUES
LEAD COMPOUNDS
MICROSCOPIC EXAMINATION
PHYSICAL PROPERTIES
POLARIZATION
SOL-GELS
THIN FILMS
DOMAIN STRUCTURE
FERROELECTRIC THIN FILMS
IMAGING RESOLUTION
PIEZORESPONSE TECHNIQUE
SCANNING FORCE MICROSCOPY
SOL GEL METHOD
FERROELECTRIC MATERIALS
URI: http://hdl.handle.net/10995/112087
Access: info:eu-repo/semantics/openAccess
SCOPUS ID: 0030109284
ISSN: 1071-1023
Appears in Collections:Научные публикации, проиндексированные в SCOPUS и WoS CC

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