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http://elar.urfu.ru/handle/10995/112034
Title: | Investigation of the Plasma Composition of a Discharge with a Self-Heating Hollow Cathode and an Active Anode in a Gas Mixture with Titanium and Hexamethyldisilazane Vapors |
Authors: | Menshakov, A. I. Bruhanova, Yu. A. Surkov, Yu. S. Skorynina, P. A. |
Issue Date: | 2021 |
Publisher: | IOP Publishing Ltd IOP Publishing |
Citation: | Investigation of the Plasma Composition of a Discharge with a Self-Heating Hollow Cathode and an Active Anode in a Gas Mixture with Titanium and Hexamethyldisilazane Vapors / A. I. Menshakov, Yu. A. Bruhanova, Yu. S. Surkov et al. // Journal of Physics: Conference Series. — 2021. — Vol. 2064. — Iss. 1. — 012046. |
Abstract: | The analysis of composition of low-pressure (~0.1-1 mTorr) hollow cathode arc plasma in Ar+N2 gas mixture with Ti+hexamethyldisilazane vapors was carried out by optical emission spectroscopy. The influence of HMDS flow rate (1-10 g/h), discharge current (10-50 A) and Ti-vapors flow on hexamethyldisilazane decomposition degree and plasma composition and was investigated. The proposed plasma activation method provides both an intense flow and a high activation degree of metal vapors, and a sufficient decomposition degree of precursor vapors for the formation of solid TiSiCN coatings at a high deposition rate. Test coatings with a thickness of 6 microns and a hardness of 31 GPa were obtained in 1 hour at 400ºС. © 2021 Institute of Physics Publishing. All rights reserved. |
URI: | http://elar.urfu.ru/handle/10995/112034 |
Access: | info:eu-repo/semantics/openAccess |
Conference name: | 15th International Conference on Gas Discharge Plasmas and Their Applications, GDP 2021 |
Conference date: | 5 September 2021 through 10 September 2021 |
SCOPUS ID: | 85120958434 |
PURE ID: | 29145527 |
ISSN: | 1742-6588 |
DOI: | 10.1088/1742-6596/2064/1/012046 |
metadata.dc.description.sponsorship: | The work was supported by the Russian Science Foundation (grant no. 20-79-10059). |
RSCF project card: | 20-79-10059 |
Appears in Collections: | Научные публикации ученых УрФУ, проиндексированные в SCOPUS и WoS CC |
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