Please use this identifier to cite or link to this item: http://hdl.handle.net/10995/112034
Title: Investigation of the Plasma Composition of a Discharge with a Self-Heating Hollow Cathode and an Active Anode in a Gas Mixture with Titanium and Hexamethyldisilazane Vapors
Authors: Menshakov, A. I.
Bruhanova, Yu. A.
Surkov, Yu. S.
Skorynina, P. A.
Issue Date: 2021
Publisher: IOP Publishing Ltd
IOP Publishing
Citation: Investigation of the Plasma Composition of a Discharge with a Self-Heating Hollow Cathode and an Active Anode in a Gas Mixture with Titanium and Hexamethyldisilazane Vapors / A. I. Menshakov, Yu. A. Bruhanova, Yu. S. Surkov et al. // Journal of Physics: Conference Series. — 2021. — Vol. 2064. — Iss. 1. — 012046.
Abstract: The analysis of composition of low-pressure (~0.1-1 mTorr) hollow cathode arc plasma in Ar+N2 gas mixture with Ti+hexamethyldisilazane vapors was carried out by optical emission spectroscopy. The influence of HMDS flow rate (1-10 g/h), discharge current (10-50 A) and Ti-vapors flow on hexamethyldisilazane decomposition degree and plasma composition and was investigated. The proposed plasma activation method provides both an intense flow and a high activation degree of metal vapors, and a sufficient decomposition degree of precursor vapors for the formation of solid TiSiCN coatings at a high deposition rate. Test coatings with a thickness of 6 microns and a hardness of 31 GPa were obtained in 1 hour at 400ºС. © 2021 Institute of Physics Publishing. All rights reserved.
URI: http://hdl.handle.net/10995/112034
Access: info:eu-repo/semantics/openAccess
Conference name: 15th International Conference on Gas Discharge Plasmas and Their Applications, GDP 2021
Conference date: 5 September 2021 through 10 September 2021
SCOPUS ID: 85120958434
PURE ID: 29145527
ISSN: 1742-6588
metadata.dc.description.sponsorship: The work was supported by the Russian Science Foundation (grant no. 20-79-10059).
RSCF project card: 20-79-10059
Appears in Collections:Научные публикации, проиндексированные в SCOPUS и WoS CC

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