Гетеродинная лазерная интрферометрия для измерений наноперемещений

Abstract

The laser heterodyne interference meter is more promising for non-contact measurements and has a high sensitivity in the 10-2-10-3 nm range, expressed in fractions of the wavelength of the laser radiation, with the ability to automate the acquisition and processing of measurement information. When determining the characteristics of an acousto-optic converter, it is necessary to use means that allow measuring absolute displacements of the surface of an object in a wide measurable dynamic range of 1-100 nm.