Модель многоступенчатого молекулярного уплотнения

Abstract

It was shown that the combination of the free molecular regime and clearance between the compression rotor and stator leads to an appreciable effect of collisionless jumping, which essentially influences the pressure in a high vacuum chamber and considerably reduces the compression ratio. As a result of the simulation, the limit compression ratio can be obtained as an optimizable function of variable parameters such as the number of stages.