Комплексное исследование микроструктуры твердых покрытий на основе пленок нитрида титана (TiN) методами рентгеновской дифрактометрии

Abstract

A microstructure of TiN samples was studied using magnetron sputtering high-power pulses. The XRD was used to study the microstructure and morphology of these coatings. The size of crystallites, the lattice parameters, and the residual stress were measured. It is shown that micro-hardness of specimens largely determined by a combination of characteristics such as residual stress and preferred orientation of crystallites in samples.