Изучение микроструктуры композитного Ti-Al-Si-N покрытия с использованием Kβ рентгеновского излучения

Abstract

We study the microstructure of composite coating based on titanium nitride by X-ray diffraction in this paper. A feature of our study is the use of the Kβ line of the characteristic X-ray spectrum to study the structural features of the surface layers. The two systems of reflections for Kα and Kβ radiation appearing on the diffractogram are used to analyze the integral information obtained from material layers located at different depths.