Эволюция фазового состава и электрических свойств аморфных пленок LiNbO3 в процессе термического отжига

Abstract

In this work, the change in the phase composition and the change in the electrical charac-teristics during the heat treatment of the films obtained in the process of high-frequency mag-netron sputtering of a single-crystal LiNbO3 target are investigated. It was established that the initial films have an amorphous structure, at a temperature of 400°C, the onset of crystalliza-tion is observed with the formation of a polycrystalline film of the composition LiNbO3. From the analysis of electrical properties, it follows that amorphous LiNbO3 films contain an em-bedded positive charge, the effective density of which varies during annealing and reaches a minimum at an annealing temperature of 450°C, which is apparently determined by the ki-netics of oxygen vacancies in the film and corresponds to the onset of its crystallization.