EDX-analysis for thin films thicknesses determination

Kamenev, A. A.; Mankevich, A. S.

Please use this identifier to cite or link to this item: http://elar.urfu.ru/handle/10995/80833

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DC Field	Value	Language
dc.contributor.author	Kamenev, A. A.	en
dc.contributor.author	Mankevich, A. S.	en
dc.date.accessioned	2020-03-24T06:59:51Z	-
dc.date.available	2020-03-24T06:59:51Z	-
dc.date.issued	2018	-
dc.identifier.citation	Kamenev A. A. EDX-analysis for thin films thicknesses determination / A. A. Kamenev, A. S. Mankevich // Scanning Probe Microscopy. Abstract Book of International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2018. — p. 132.	en
dc.identifier.isbn	978-5-9500624-1-4	-
dc.identifier.uri	http://elar.urfu.ru/handle/10995/80833	-
dc.description.sponsorship	The work was partly supported by the Ministry of Science and Education of Russian Federation under contract 14.579.21.0141.	en
dc.format.mimetype	application/pdf	en
dc.language.iso	en	en
dc.publisher	Ural Federal University	en
dc.relation.ispartof	International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials". — Ekaterinburg, 2018	en
dc.title	EDX-analysis for thin films thicknesses determination	en
dc.type	Conference Paper	en
dc.type	info:eu-repo/semantics/conferenceObject	en
dc.type	info:eu-repo/semantics/publishedVersion	en
dc.conference.name	International Conference "Scanning Probe Microscopy" ; International Workshop "Modern Nanotechnologies" ; International Youth Conference "Functional Imaging of Nanomaterials"	en
dc.conference.date	26.08.2018-29.08.2018	-
local.description.firstpage	132	-
local.description.lastpage	132	-
local.description.order	P-33	-
Appears in Collections:	Scanning Probe Microscopy

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