РФЭС-аттестация тонкопленочных углеродных композитов с переменной гибридизацией

Abstract

The purpose of this paper is to obtain data on the elemental and chemical composition of a surface layer several tens of atomic monolayers thick. The essence of the technique is to record and analyze the spectrum of secondary electrons excited by an X-ray beam. A high resolution in the energy of the detected electrons makes it possible to determine even tiny shifts in the peaks due to a change in the chemical state of the atoms, which makes it possible to study thin surface layers. As a system of samples, we used films of 20 - 400 nm long carbon chains on copper and silicon substrates synthesized by ion condensation in high vacuum, where alignment of the beams of carbon and argon ions facilitates the growth of a film of hexagonally packed sp1 chains.