Browsing by Author Ivkov, S. A.
Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
2021 | Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films | Terekhov, V. A.; Nesterov, D. N.; Barkov, K. A.; Domashevskaya, E. P.; Konovalov, A. V.; Fomenko, Y. L.; Seredin, P. V.; Goloshchapov, D. L.; Popov, A. I.; Barinov, A. D.; Andreeshchev, V. M.; Zanin, I. E.; Ivkov, S. A.; Loktionova, O. E. |