Browsing by Author Rezvan, A. A.
Showing results 2 to 5 of 5 < previous
|2019||Formation of vacuum electronics elements by a combination of methods of focused ion beams and plasma layer etching on SiC||Rezvan, A. A.; Klimin, V. S.; Kots, I. N.|
|2018||Local anodic oxidation by the probe method as a surface modification method for nanoscale profiling||Rezvan, A. A.; Klimin, V. S.|
|2018||Masking layer formation on silicon substrate by the focused ion beams method for plasma-chemical treatment||Kots, I. N.; Klimin, V. S.; Rezvan, A. A.; Polyakova, V. V.; Ageev, O. A.|
|2018||Study of formation of high aspect GaAs structures based on the method of focused ion beams||Rezvan, A. A.; Klimin, V. S.; Solodovnik, M. S.|